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Micromachines, Vol. 16, Pages 1073: Hybrid Inductively Coupled Plasma and Computer-Controlled Optical Surfacing Polishing for Rapid Fabrication of Damage-Free Ultra-Smooth Surfaces

Micromachines, Vol. 16, Pages 1073: Hybrid Inductively Coupled Plasma and Computer-Controlled Optical Surfacing Polishing for Rapid Fabrication of Damage-Free Ultra-Smooth Surfaces Micromachines doi: 10.3390/mi16091073 Authors: Li Jiao Luo Xin Fan Wu Gao Chen The...
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